Author: Broderick, N.
Paper Title Page
TUPTS001 Improvements in Rf Multi Cusp Negative Ion Source 1928
  • A.M. George, M.P. Dehnel, S.V. Melanson, D.E. Potkins, T.M. Stewart
    D-Pace, Nelson, British Columbia, Canada
  • N. Broderick
    University of Auckland, Auckland, New Zealand
  • Y. Shimabukuro
    Doshisha University, Graduate School of Engineering, Kyoto, Japan
  D-Pace’s 13.56 MHz Radio Frequency (RF) multi cusp negative ion source uses an Aluminium Nitride (AlN) dielectric window for coupling RF power from an external antenna to the plasma chamber. Ion source operation was limited to low RF power (< 3500 W) due to failures (cracks) occurring on the window during experiments. Such events can cause damages to the vacuum system and plasma chamber. The current work deals with simulations performed on the ion source to study the factors leading to the failure of the window. Based on results from the simulations, a new design was introduced. The improved design yielded positive results in terms of source performance and stability of the AlN window.  
DOI • reference for this paper ※  
About • paper received ※ 15 May 2019       paper accepted ※ 22 May 2019       issue date ※ 21 June 2019  
Export • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)